通過對陽極氧化多孔Al2O3 薄膜感濕材料的制備工藝及其電容濕敏特性進行研究,將陽極氧化參數對多孔Al2O3 薄膜的結構和形態的影響與多孔Al2O3 薄膜作為濕度傳感器感濕材料的濕敏特性聯系起來進行分析,為優化制備工藝參數提供更充分的實驗數據,使新型多孔Al2O3 薄膜濕度傳感器具有更好的感濕特性。
關鍵詞: 多孔Al2O3 薄膜; 濕度傳感器; 陽極氧化
Abstract : The preparation technologies and the capacitance humidity sensitive characters of anodic oxidation porous Al2O3 thin film have been investigated. The humidity response characters had been analyzed with the af2 fection of anodic oxidation parameters on the structure and morphology of porous Al2O3 thin film ,as a high quali2 ty humidity response material of humidity sensor. So it could put forth more sufficient experiment datum to im2
prove the processing parameters and made this new porous Al2O3 thin film humidity sensor with more splendid humidity response properties.
Key words : porous Al2O3 thin film; humidity sensor ; anodic oxidation