含有多傳感器的微機(jī)電系統(tǒng)在組裝傳感器時(shí), 一般存在著軸對(duì)準(zhǔn)問(wèn)題, 軸的非對(duì)準(zhǔn)誤差能導(dǎo)致很大的系統(tǒng)測(cè)量誤差。為此提出一種基于光對(duì)準(zhǔn)的誤差補(bǔ)償方法, 可以在不需要高精度軸對(duì)準(zhǔn)的前提下, 對(duì)裝配后的組件進(jìn)行后續(xù)誤差檢測(cè)和實(shí)時(shí)補(bǔ)償, 有效地消除裝配誤差對(duì)測(cè)量精度的影響。將該方法實(shí)施于微機(jī)電方位水平儀, 用以測(cè)量姿態(tài), 通過(guò)仿真結(jié)果證實(shí)了方法的有效性。關(guān)鍵詞: 微機(jī)電系統(tǒng); 多傳感器; 軸裝配誤差; 光對(duì)準(zhǔn); 誤
差補(bǔ)償
Abstract: A xis2m isalignment p roblem s occur when mult ip le senso rs are assembled into a m icro2elect ro2mechanical system. The axes m isalignment inevitably induces large measurement erro rs. The p roblem is so lved using an erro r compensation method based on
op t ical alignment. The method does no t require imp roved assembly accuracy, but uses erro r po st2surveying and on2line compensation to elim inate assembly erro rs. Result s of simulations conducted w ith a m icro2elect ro2mechanical azimuth2level detecto r p rove the validity of the method.
Key words: m icro2electro2mechanical system; multi2senso r; axis2m isalignment erro r; op tical alignment; erro r compensation