涉及到一種基于PSD 原理的高精度三維輪廓測量儀。X—Y 工作臺采用了宏驅動與微驅動相結合的工作方式。宏工作臺采用步進電機驅動, 進給精度達1 微米; 微工作臺采用精密壓電陶瓷驅動, 進給精度最小可達1 納米。這樣, 使得X—Y 測量步距達到1 納米的條件下, 測量物件的尺寸范圍可以擴大為20mm ×20mm , 不僅適合微小構件的精密測量, 而且適合較大器件的精密測量, 且X—Y 方向的位移測量精度最小可達1 納米。Z 方向位移傳感器采用激光單點位置探測器PSD, Z 軸方向的位移測量精度達10 納米。對微輪廓測量儀的控制系統作了程序設計, 得到了較滿意的效果。
關鍵詞　微輪廓測量儀　位置敏感檢測器　激光單點陣掃描　控制系統　精密測量
Abstract　Based on PSD p rincip le a h igh p recision 3D p rofiler is p resented. X Y tables adop t combining macro driving w ith m icro driving. The macro table uses step mo to r, the reso lut ion of step is a m icron and the m icro table is driven by p iezoelect ricity ceram ics, it s reso lut ion of step is 1 nm. So under the condit ion of 1 nm of dis2 p lacement, the measurement of object can enlarge to 20mm X 20mm, it is no t only fit fo r p recision measurement of m icro component, but also fit fo r p recision measurement of relat ive bigger component, the reso lut ion of dis2 p lacement of X Y axis is 1 nm. The disp lacement senso r of Z axis adop t s single po int laser po sit ion detecto r PSD, and it s reso lut ion is about 10nm. The p rocedure of who le cont ro l system is p rogrammed w ith V isual Ba2 sic610, and get a bet ter result.
Key words　M icro p rofilometer　PSD　Single laser lat t ice scan　Cont ro l system　P recision measurement