用廣義板理論和有限元平板殼元素與三維實體元素的組合方法,建立了微型加速度傳感器整體的有限元分析模型。對模型進(jìn)行了靜態(tài)和動態(tài)分析,給出了具體的分析結(jié)果。依據(jù)強(qiáng)度條件對工作梁進(jìn)行了優(yōu)化設(shè)計,使微型加速度傳感器的結(jié)構(gòu)分析和設(shè)計更加合理。
關(guān)鍵詞: 雙島五梁; 微型加速度傳感器; 結(jié)構(gòu)分析;優(yōu)化設(shè)計

Abstract : With the theory of broad plates and combination method of plate2shell elements with 3D solid elements
the finite element , an analysis model of the whole structure of the microaccelerometer is created. The static and dy2
namic properties for the model are analyzed , and the analysis result is presented. According to the condition of
strength , the work2beam is optimally designed , which makes analysis for the structure and design of the microacceler2
ometer more rational.
Key words : Twin2island and five2beam; Microaccelerometer ; Structural analysis ; Optimization design